Displacement device, particularly for the photolithographic treatment of a substrate
US4655594A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1986 |
| Grant date | Apr 7, 1987 |
| Priority date | — |
| Expiry date | Mar 11, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A displacement device, particularly useful in an apparatus for the photolithographic treatment of a substrate, is provided with a holder placed on a carriage mechanism being acted upon by driving members for imparting translational and rotary movements to the holder. The carriage is constituted by a lower carriage part and an upper carriage part, each of which has a flat surface facing each other. Three linear driving members, each having a housing and a driving element projecting from both ends of the housing, and axially moving with respect to the housing, act upon the carriage. The housing of the first driving member is connected to an upper carriage part, while the driving elements of the second and third driving members are coupled to the lower carriage part with the second and third driving members respectively being connected to the first driving member in an arrangement in the shape of an H.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.