Stefan Wittekoek
6Patents
6h-index
4Co-inventors
52Inventor score
Filing activity: Jun 9, 1980 → May 6, 1993
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5100237A | Apparatus for projecting a mask pattern on a substrate | Physics | 76 | Expired |
| US5144363A | Apparatus for and method of projecting a mask pattern on a substrate | Physics | 74 | Expired |
| US5481362A | Apparatus for projecting a mask pattern on a substrate | Physics | 56 | Expired |
| US4356392A | Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed | Physics | 47 | Expired |
| US4655594A | Displacement device, particularly for the photolithographic treatment of a substrate | Electricity | 26 | Expired |
| US4334139A | Apparatus for writing patterns in a layer on a substrate by means of a beam of electrically charged particles | Electricity | 20 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.