Glow discharge method of applying a carbon coating onto a substrate
US4663183A · kind A · utility
100Cited by
7References
57Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 1984 |
| Grant date | May 5, 1987 |
| Priority date | — |
| Expiry date | Sep 10, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02205
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method of forming a hard, carbonaceous film on a substrate and the hard carbonaceous film formed thereby. The hard carbonaceous film is formed by decomposing a gaseous hydrocarbon having carbon atoms tetrahedrally coordinated to carbon nearest neighbors through carbon-carbon single bonds. The gaseous hydrocarbon is decomposed in a radio frequency maintained plasma and the plasma decomposition products are deposited on a cathodic substrate. Optionally, fluorocarbons may be present in a decomposition gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.