Method and apparatus for coating a substrate
US4663197A · kind A · utility
12Cited by
13References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 18, 1985 |
| Grant date | May 5, 1987 |
| Priority date | — |
| Expiry date | Jan 18, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67784
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
This invention relates to method and apparatus of transporting and coating substrates within a confined longitudinal passageway. The method is characterized by the transport and coating of substrates without human or mechanical contact. The method includes supplying a fluid medium into the confined passageway and discharging the fluid medium from the passageway, such that the moving fluid cushions while longitudinally transporting the substrate within the passageway.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.