Integrated Automation
7Patents
0Active
7Granted
27Portfolio score
Filing activity: Sep 28, 1984 → Nov 24, 1987
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4622918A | Module for high vacuum processing | Electricity | 355 | Expired |
| US4662987A | Method of double floating transport and processing of wafers within a confined passageway | Electricity | 329 | Expired |
| US4853970A | Apparatus for processing digitized images | Physics | 55 | Expired |
| US4681776A | Improved method for double floating transport and processing of wafers | Performing Operations; Transporting | 17 | Expired |
| US4663197A | Method and apparatus for coating a substrate | Electricity | 12 | Expired |
| US4600471A | Method and apparatus for transport and processing of substrate with developing agent | Electricity | 4 | Expired |
| US4620997A | Method for coating substrates | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.