Pressure transducer
US4665754A · kind A · utility
32Cited by
2References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1985 |
| Grant date | May 19, 1987 |
| Priority date | — |
| Expiry date | Apr 8, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and a back side for receiving pressure from a pressure medium. The transducer further comprises a pressure vessel having an aperture and apparatus including a hermetic seal for mounting the die with the front side of the die facing the aperture. In this manner, the die is compressed toward the pressure vessel when positive pressure is applied to the back side of the die by the pressure medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.