Rinsing apparatus and method
US4674521A · kind A · utility
17Cited by
7References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 20, 1985 |
| Grant date | Jun 23, 1987 |
| Priority date | — |
| Expiry date | May 20, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Rinsing methods and apparatus employ a rotatable work support to spray rinsing liquid against a surrounding wall of a processing station. The rinsing liquid washes residual processing liquid from the surrounding wall of the processing station, whereby the work support performs a cleaning function in addition to its conventional processing function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.