Vaccine Technology Limited
23Patents
1Active
23Granted
38Portfolio score
Filing activity: May 11, 1976 → Dec 2, 2005 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4722298A | Modular processing apparatus for processing semiconductor wafers | Emerging Cross-Sectional Technologies | 610 | Expired |
| US4717461A | System and method for processing workpieces | Emerging Cross-Sectional Technologies | 362 | Expired |
| US4756810A | Deposition and planarizing methods and apparatus | Electricity | 119 | Expired |
| US4673456A | Microwave apparatus for generating plasma afterglows | Electricity | 72 | Expired |
| US4852516A | Modular processing apparatus for processing semiconductor wafers | Emerging Cross-Sectional Technologies | 60 | Expired |
| US4062463A | Automated single cassette load mechanism for scrubber | Emerging Cross-Sectional Technologies | 53 | Expired |
| US5094884A | Method and apparatus for applying a layer of a fluid material on a semiconductor wafer | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5114556A | Deposition apparatus and method for enhancing step coverage and planarization on semiconductor wafers | Electricity | 49 | Expired |
| US4711610A | Balancing chuck | Emerging Cross-Sectional Technologies | 43 | Expired |
| US4664935A | Thin film deposition apparatus and method | Chemistry; Metallurgy | 37 | Expired |
| US4856456A | Apparatus and method for the fluid treatment of a workpiece | Performing Operations; Transporting | 29 | Expired |
| US4190015A | Apparatus for dispensing liquid to spinning workpieces | Performing Operations; Transporting | 26 | Expired |
| US4281031A | Method and apparatus for processing workpieces | Emerging Cross-Sectional Technologies | 22 | Expired |
| US4674521A | Rinsing apparatus and method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US4885075A | Cooling device for a sputter target and source | Chemistry; Metallurgy | 14 | Expired |
| US4685852A | Process apparatus and method and elevator mechanism for use in connection therewith | Emerging Cross-Sectional Technologies | 13 | Expired |
| US4776923A | Plasma product treatment apparatus and methods and gas transport systems for use therein | Electricity | 11 | Expired |
| US4109337A | Automated two-sided cleaning apparatus | Performing Operations; Transporting | 9 | Expired |
| US4592926A | Processing apparatus and method | Emerging Cross-Sectional Technologies | 7 | Expired |
| US4519526A | Method and apparatus for dispensing liquid | Physics | 7 | Expired |
| US4818561A | Thin film deposition apparatus and method | Chemistry; Metallurgy | 7 | Expired |
| US4517752A | Splash retarder | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US8765721B2 | Composition comprising phosphatidyl serine and an antigen or allergen and the use thereof | Human Necessities | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.