Method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus
US4675602A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1985 |
| Grant date | Jun 23, 1987 |
| Priority date | — |
| Expiry date | Feb 27, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for automatically setting an operating point in signal curve measurements with particle beam measuring apparatus. An automatic setting of the operating point is provided when no specific point in time is known at which a reference potential is present at a measuring location. Given stroboscopically keyed primary particles, a periodic signal curve, which also comprises a specific reference potential in addition to other potentials, is applied to the measuring location. The keying phase of the keyed primary particles is varied with respect to the periodic signal curve. The periodic signal curve is quantitatively registered in this fashion. The phase point of the qualitatively registered signal curve which corresponds to the specific reference potential at the measuring location is identified. A keying phase of the primary particles is kept constant during the setting of the operating point, and is kept constant to phase points at which the reference potential is present at the measuring location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.