Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
US4682503A · kind A · utility
77Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1986 |
| Grant date | Jul 28, 1987 |
| Priority date | — |
| Expiry date | May 16, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microscopic size absolute pressure sensor for air or gas of the thermal conductivity type, a silicon nitride covered silicon microchip has an elongated V-groove anisotropically etched in the silicon with a heated silicon nitride bridge element extending over the surface of the V-groove.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.