Positioning apparatus for a circular substrate
US4685206A · kind A · utility
24Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1985 |
| Grant date | Aug 11, 1987 |
| Priority date | — |
| Expiry date | Dec 2, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53178
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A positioning apparatus for positioning a circular substrate having a notch in a circumferential edge includes a notch sensor which senses the rotational position of the substrate about a center axis, a pushing member adapted to fit into the notch and moved toward the center axis to displace the substrate so as to engage positioning elements, and a detector that detects the fitting of the pushing member in the notch, the detector being movable with the pushing member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.