Method for automatically setting the voltage resolution in particle beam measuring devices and apparatus for implementation thereof
US4686466A · kind A · utility
3Cited by
3References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1985 |
| Grant date | Aug 11, 1987 |
| Priority date | — |
| Expiry date | Feb 27, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for setting voltage resolution in particle beam measuring devices wherein band width of a measured signal processing is modified. In order to set a desired voltage resolution simply, reliably, and with high precision, a signal noise of the measured signal is measured. This signal noise is compared to a desired value for the measured signal resolution, and the band width of the measured signal processing is modified such that the signal noise of the measured signal is less than or equal to the desired value for the measured signal resolution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.