Differential plane mirror interferometer
US4693605A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 12, 1986 |
| Grant date | Sep 15, 1987 |
| Priority date | — |
| Expiry date | Jun 12, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential plane mirror interferometric comprises a source (10) which emits a light beam containing two linear orthogonally polarized components; a tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the input beam into two separated, parallel, orthogonally polarized beams; a half-wave retardation plate (29A, 29) located in one of the separated beams for converting said two separated, parallel, orthogonally polarized beams into two separated parallel beams with the same polarization; means including a polarizing beamsplitter (44), for causing each of the separated parallel beams with the same polarization to be reflected twice by one of two plane mirrors (71, 70) to produce two parallel output beams with the same polarization; a half-wave retardation plate (29B, 29) located in one of the separated parallel output beams, with the tilted parallel plate (16) having regions of reflection, antireflection and polarization coatings for converting the two separated parallel orthogonally polarized output beams into a single output beam in which the phase difference between the two polarization components of the single output b…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.