Patent · US Expired

Semiconductor device microstructure

US4696188A · kind A · utility

54Cited by
21References
93Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 6, 1985
Grant dateSep 29, 1987
Priority date
Expiry dateSep 6, 2005

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N19/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A semiconductor device comprising a semiconductor body having a depression formed into the first surface of the body. The device further comprises member means comprising first and second thermal-to-electric transducer or static electric element, the member means having a predetermined configuration suspended over the depression. The member means is connected to the first surface at least at one location, the depression opening to the first surface around at least a portion of the predetermined configuration. The depression provides substantial physical and thermal isolation between the elements and the semiconductor body. In this manner, an integrated semiconductor device provides an environment of substantial physical and thermal isolation between the transducer or element and the semiconductor body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.