Position detector by vibrating a light beam for averaging the reflected light
US4698513A · kind A · utility
11Cited by
1References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1987 |
| Grant date | Oct 6, 1987 |
| Priority date | — |
| Expiry date | Jan 23, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for measuring the position of an object has a light radiation mechanism for causing light to be obliquely incident on a surface of the object, a vibrating mechanism for vibrating the light incident on the surface of the object at a predetermined frequency, and a detecting mechanism for detecting light reflected by the surface of the object, generating a detection signal, and obtaining the position of the object in accordance with the detection signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.