Method for growing patterned metal layers
US4701347A · kind A · utility
8Cited by
4References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 1986 |
| Grant date | Oct 20, 1987 |
| Priority date | — |
| Expiry date | Apr 18, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/903
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Patterned metal growth is obtained on a substrate by illuminating the substrate in the presence of a metal containing molecule adsorbed on the substrate. After initial illumination, the photoreacted molecules catalyze further metal growth without further illumination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.