Precision device for reducing errors attributed to temperature change reduced
US4705016A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 2, 1986 |
| Grant date | Nov 10, 1987 |
| Priority date | — |
| Expiry date | May 2, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49207
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A precision device including a holding mechanism for holding an object and a supporting mechanism for supporting an operating element, one of which is movable in a predetermined direction. The precision device includes a detecting device for detecting the amount of movement of one of the holding holding and supporting mechanisms in the predetermined direction, and the detecting device includes a scale formed of a material having a coefficient of linear expansion, in a temperature range of -20.degree. to 100.degree. C., of not more than 10.times.10.sup.-7 /.degree.C. as an absolute value. The precision device further includes a detecting device for detecting the amount of thermal expansion of at least a part of the supporting mechanism in the predetermined direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.