Means and methods for heating semiconductor ribbons and wafers with microwvaes
US4714810A · kind A · utility
8Cited by
2References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 28, 1986 |
| Grant date | Dec 22, 1987 |
| Priority date | — |
| Expiry date | Jul 28, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Means and method including a novel waveguide sample holder for applying traveling microwaves to heat thin low-resistivity semiconductor ribbons and wafers without a susceptor. Traveling microwaves are applied to the semiconductor materials, both with and without a traveling wave resonator. Efficient coupling is obtained by unique placement of the samples in the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.