Murray D. Sirkis
12Patents
9h-index
13Co-inventors
65Inventor score
Filing activity: Jul 28, 1986 → Mar 5, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5631685A | Apparatus and method for drying ink deposited by ink jet printing | Electricity | 110 | Expired |
| US7164236B2 | Method and apparatus for improved plasma processing uniformity | Electricity | 55 | Expired |
| US6917204B2 | Addition of power at selected harmonics of plasma processor drive frequency | Electricity | 49 | Expired |
| US6891124B2 | Method of wafer band-edge measurement using transmission spectroscopy and a process for controlling the temperature uniformity of a wafer | Electricity | 27 | Expired |
| US6646386B1 | Stabilized oscillator circuit for plasma density measurement | Electricity | 21 | Expired |
| US6753498B2 | Automated electrode replacement apparatus for a plasma processing system | Electricity | 20 | Expired |
| US6741944B1 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Electricity | 19 | Expired |
| US6573731B1 | Electron density measurement and control system using plasma-induced changes in the frequency of a microwave oscillator | Electricity | 10 | Expired |
| US6861844B1 | Electron density measurement and plasma process control system using changes in the resonant frequency of an open resonator containing the plasma | Electricity | 10 | Expired |
| US4714810A | Means and methods for heating semiconductor ribbons and wafers with microwvaes | Electricity | 8 | Expired |
| US6799532B2 | Stabilized oscillator circuit for plasma density measurement | Electricity | 5 | Expired |
| US6713969B2 | Method and apparatus for determination and control of plasma state | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.