Patent · US Expired

Semiconductor device having junction formed from two different hydrogenated polycrystalline silicon layers

US4719501A · kind A · utility

23Cited by
4References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 26, 1985
Grant dateJan 12, 1988
Priority date
Expiry dateDec 26, 2005

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/547
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor element is mainly composed of a polycrystalline Si thin film layer containing 0.01-3 atomic %, and further having a maximum surface unevenness of substantially not more than 800 .ANG. and/or a particular range of etching rate when etched with a predetermined etchant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.