Vacuum chamber gate valve
US4721282A · kind A · utility
46Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1986 |
| Grant date | Jan 26, 1988 |
| Priority date | — |
| Expiry date | Dec 16, 2006 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A gate valve assembly includes a housing, a shaft axially mounted within the housing, and a gate member secured to one end of the shaft. A mechanism within the housing is provided for axially extending and rotating the shaft in order to move the gate member into sealing engagement with a port in a processing chamber. By providing an expandable seal about the shaft and secured to the housing, the mechanical drive portion of the valve may be isolated from the interior of the chamber. The valve is particularly suitable for use with loadlocks and other chambers having a low pressure environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.