Electrostatic wafer clamp
US4724510A · kind A · utility
56Cited by
5References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 1986 |
| Grant date | Feb 9, 1988 |
| Priority date | — |
| Expiry date | Dec 12, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer clamp is disclosed in which a high voltage capacitor is formed on a semiconductor wafer, which rests on a conductive support. The plates of the capacitor comprise a plurality of concentric rings formed on the surface of the wafer with alternate rings connected together.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.