Short-channel field effect transistor
US4729001A · kind A · utility
32Cited by
1References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 25, 1983 |
| Grant date | Mar 1, 1988 |
| Priority date | — |
| Expiry date | Nov 25, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6715
Abstract
An improved short-channel field effect transistor including a standard tip implant type of source and drain each disposed in the surface of a semiconductor substrate and a gate electrode positioned upon the substrate between the source and drain and control plugs disposed in the substrate and associated with and contiguous to the source and drain for eliminating substrate punch-through currents without substantially increasing the device junction capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.