Scanning laser microscope with aperture alignment
US4733063A · kind A · utility
39Cited by
2References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 1986 |
| Grant date | Mar 22, 1988 |
| Priority date | — |
| Expiry date | Dec 15, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal scanning laser microscope according to the present invention employs an aperture which is provided at a predetermined position within a plane of a photomask including rectilinear pattern edges orthogonal to each other formed on a transparent substrate. The aperture is moved in such a way that coordinate positions at which a laser beam traverses the respective rectilinear pattern edges orthogonal to each other are found using output signals from an optical detector, and it is consequently brought into agreement with a focused position of the laser beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.