Capacitance type displacement measuring instrument
US4733235A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 1984 |
| Grant date | Mar 22, 1988 |
| Priority date | — |
| Expiry date | Oct 26, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/2415
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitance type displacement measuring instrument is disclosed in which a change in electric capacity between electrodes due to a change in displacement between two members movable relative to each other is detected on the basis of a change in phase of a detection signal and a displacement value between the two members is measured from the change in the capacity. AC signals are successively applied to transmitting electrodes provided on one of the members at a predetermined pitch by a multiplexer and signals induced in transfer electrodes at a predetermined pitch differing from the aforesaid pitch of the transmitting electrodes are received by pickup electrodes provided on the aforesaid one of the members. The relative displacement is detected from a change in phase of a received signal of substantially triangular waveform, which are obtained by the pickup electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.