Method of fabricating electrostatic drums using microwave energy
US4745000A · kind A · utility
1Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 1987 |
| Grant date | May 17, 1988 |
| Priority date | — |
| Expiry date | Jan 29, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0262
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An improved method of fabricating the thin film layers of an electrostatic image producing device utilizing microwave energy by operating at substantially the minimum of the pressure-power curve for the particular geometry of reaction vessel and composition of reaction gases being utilized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.