Method and device to discharge samples of insulating material during ion analysis
US4748325A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 14, 1987 |
| Grant date | May 31, 1988 |
| Priority date | — |
| Expiry date | Jul 14, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/026
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
To compensate for the charges created during the bombardment of a sample of insulating material, positively polarized by a beam of positive, primary ions, the method uses the secondary electrons emitted by the acceleration electrode under the impact of particles, emitted by the sample, which have not passed through the hole provided in this electrode for analysis. For this, an additional electrode, having a hole of a diameter greater than that of the acceleration electrode and carried to a potential which is greater than that of the same electrode by about 100 volts, is placed between the sample and this electrode, near the latter, to focus the secondary electrons on the imaged field of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.