Apparatus for removing organic substance from substrate
US4756047A · kind A · utility
26Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 15, 1986 |
| Grant date | Jul 12, 1988 |
| Priority date | — |
| Expiry date | Oct 15, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31138
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for removing organic substances from a substrate, including ultraviolet lamps provided above a horizontal hot plate on which a substrate is placed; an ozone blow-off pipe which blows ozone downward, provided at a position appropriately distant from the surface of the hot plate on which the substrate is placed, the ozone blow-off pipe being so arranged as to be reciprocated relative and parallel to the surface of the hot plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.