Automatic accurate alignment system
US4757550A · kind A · utility
29Cited by
12References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 9, 1985 |
| Grant date | Jul 12, 1988 |
| Priority date | — |
| Expiry date | May 9, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An automatic accurate alignment system for positioning an object to be worked which has a certain pattern on its surface at a required position. The system performs primary positioning of the object to be worked on the basis of low magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively low magnification. Thereafter, the system performs secondary positioning of the object to be worked on the basis of high magnification pattern matching with respect to at least a part of the image of the object magnified at a relatively high magnification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.