Laser beam scanning pattern generation system with positional and dimensional error correction
US4761561A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 21, 1986 |
| Grant date | Aug 2, 1988 |
| Priority date | — |
| Expiry date | Nov 21, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/0082
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In a pattern generating system for scanning a pattern on a surface of a workpiece with a laser beam modulated by drawing data so as to form a pattern corresponding to design pattern data, a plurality of through holes are formed at predetermined positions of the workpiece. Beams transmitted through the through holes are directed to a sensor for generating a detection output representing positions of the transmitted beams. A computer generates position data of the through holes on the basis of the detection output and calculates a positional error and a deformation amount of the workpiece. A correcting device corrects the drawing on the basis of the positional error and the deformation amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.