Flip-chip pressure transducer
US4763098A · kind A · utility
34Cited by
13References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 1985 |
| Grant date | Aug 9, 1988 |
| Priority date | — |
| Expiry date | Apr 8, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a pressure transducer comprising a pressure sensitive silicon die having a front side exposing piezoresistive means and comprising means for flip-chip mounting the die to a pressure vessel. The transducer further comprises a pressure vessel having an aperture, the pressure vessel comprising means for flip-chip mounting the die over the aperture. The die is flip-chip mounted over the aperture in the pressure vessel, and there is a hermetic seal between the pressure vessel and the die.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.