Process for production of quaternary ammonium hydroxides
US4776929A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1987 |
| Grant date | Oct 11, 1988 |
| Priority date | — |
| Expiry date | Nov 12, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25B3/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for production of high purity quarternary ammonium hydroxides, comprising electrolyzing quarternary ammonium hydrogencarbonates represented by the general formula: ##STR1## (wherein the symbols are as defined in the appended claims) in an electrolytic cell comprising an anode compartment and a cathode compartment defined by a cation exchange membrane. In accordance with this process, high purity quarternary ammonium hydroxides can be produced with high electrolytic efficiency and further without causing corrosion of equipment. Since the quarternary ammonium hydroxides produced by the present invention are of high purity, they can be effectively used as, for example, cleaners, etchants or developers for wafers in the production of IC and LSI in the field of electronics and semiconductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.