Crucible for evaporation of metallic film
US4791261A · kind A · utility
13Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1987 |
| Grant date | Dec 13, 1988 |
| Priority date | — |
| Expiry date | Sep 23, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An evaporation source for RF heated evaporators in which the crucible has a susceptor made of a solid block of graphite carbon having a volume commensurate with the volume of molten material prior to evaporation. Moreover, the crucible has a depth that is less than twice its diameter. These features enhance the self-fractionation of the molten material prior to evaporation to thus enhance the properties of the film as-deposited.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.