System for detection of extremely small particles in a low pressure environment
US4792199A · kind A · utility
15Cited by
8References
8Claims
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Key dates
| Filing date | Oct 27, 1987 |
| Grant date | Dec 20, 1988 |
| Priority date | — |
| Expiry date | Oct 27, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for detection of extremely small particles in a low pressure environment or vacuum includes a vapor column in which a diffusion oil is vaporized, a saturation column in which vaporized oil is cooled and supersaturated, and means for directing a low pressure gas into the saturation column. An optical detector senses the oil droplets that grow around extremely small particles which are introduced in the saturation column by the gas and fall past the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.