High Yield Technology, Inc.
26Patents
0Active
26Granted
32Portfolio score
Filing activity: Sep 16, 1986 → Apr 11, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5424558A | Apparatus and a method for dynamically tuning a particle sensor in response to varying process conditions | Electricity | 83 | Expired |
| US5132548A | High sensitivity, large detection area particle sensor for vacuum applications | Physics | 61 | Expired |
| US4739177A | Light scattering particle detector for wafer processing equipment | Physics | 45 | Expired |
| US4783599A | Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180.degree. apart | Physics | 26 | Expired |
| US5266798A | High sensitivity, large detection area particle sensor for vacuum applications | Physics | 26 | Expired |
| US5347138A | In situ real time particle monitor for a sputter coater chamber | Physics | 20 | Expired |
| US4804853A | Compact particle flux monitor | Physics | 20 | Expired |
| US5637881A | Method to detect non-spherical particles using orthogonally polarized light | Physics | 19 | Expired |
| US5436465A | Modular particle monitor for vacuum process equipment | Physics | 18 | Expired |
| US4896048A | Scattering-type particle detection device for use in high temperature process chambers | Physics | 17 | Expired |
| US4792199A | System for detection of extremely small particles in a low pressure environment | Physics | 15 | Expired |
| US4894529A | Real-time particle counter for liquids with nebulizer and dryer | Physics | 14 | Expired |
| US5360980A | Structure and method for providing a gas purge for a vacuum particle sensor installed in a corrosive or coating environment | Physics | 13 | Expired |
| USRE33213E | Light scattering particle detector for wafer processing equipment | General | 11 | Expired |
| US5235625A | Method for synchronizing particle counters to external events | Physics | 11 | Expired |
| US4812664A | Apparatus for scanning a flat surface to detect defects | Physics | 10 | Expired |
| US4825094A | Real time particle fallout monitor with tubular structure | Physics | 10 | Expired |
| US5247188A | Concentrator funnel for vacuum line particle monitors | Physics | 6 | Expired |
| US5534706A | Particle monitor for throttled pumping systems | Physics | 6 | Expired |
| US5212580A | Low cost stage for raster scanning of semiconductor wafers | Electricity | 6 | Expired |
| US5055698A | Real-time particle sensor for disk drives | Physics | 6 | Expired |
| US5606418A | Quasi bright field particle sensor | Physics | 6 | Expired |
| US5157678A | Laser safe housing for a particle monitor in vacuum pump lines | Physics | 3 | Expired |
| US5406830A | Particle monitor for loadlock soft pump lines | Physics | 2 | Expired |
| US5773841A | Self aligning vacuum seal assembly | Chemistry; Metallurgy | 2 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.