Patent · US Expired

Semiconductor device

US4794445A · kind A · utility

11Cited by
1References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 29, 1987
Grant dateDec 27, 1988
Priority date
Expiry dateJul 29, 2007

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/76281
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device has a structure in which two semiconductor substrates are coupled to each other through a semiconductor oxide film and a metal silicide film, and a semiconductor element, for example, a bi-polar transistor is formed in the semiconductor substrate on the metal silicide film side, whereby a metal silicide layer having a high melting point is provided beneath one region of the bi-polar transistor for example, an n.sup.+ buried collector layer and in ohmic contact with the n.sup.+ buried collector layer. An electrical isolation between the adjacent semiconductor elements is made by an insulating layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.