Charged particle accelerator using quadrupole electrodes
US4801847A · kind A · utility
21Cited by
10References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1985 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Jul 29, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H9/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A charged particle accelerator is provided with quadrupole electrodes with surfaces that are opposed to each other and are undulated, and with an external resonance circuit. The external resonance circuit consists of a capacitor formed by the opposing electrodes, a variable capacitor provided in parallel with said capacitor, and a coil. The resonance frequency is variable. A direct current and an alternating current may be applied in a superposed manner to the quadrupole electrodes. The thus constructed accelerator can be employed for an ion implanter to implant a heavy-current ion beam of several hundred KeV to several MeV.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.