Patent · US Expired

Method for making targets

US4803046A · kind A · utility

5Cited by

3References

14Claims

0Family size

Assignee

Demetron Gesellschaft fuer Elektronik-Werkstoffe m.b.H. · DE

Inventors

Juergen Hausselt · Germersheim, DE
Stephan Schittny · Alzenau, DE
Dieter Kaufmann · Heidenheim, DE

Key dates

Filing date	Aug 14, 1987
Grant date	Feb 7, 1989
Priority date	—
Expiry date	Aug 14, 2007

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/3414
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A method for working high-purity, mechanically strong targets containing brittle phases in the equilibrium state. First a porous body is manufactured from part of the component with a higher melting point and thereafter the porous body is impregnated with an impregnating composition corresponding to the remainder of the components required to form the ultimate composition of the target. The composition of the impregnation material must be selected in such a manner that the reaction between the impregnation material and the porous body shall produce no phases of low melting points.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.