Conveyor arm apparatus with gap detection
US4803373A · kind A · utility
39Cited by
9References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1987 |
| Grant date | Feb 7, 1989 |
| Priority date | — |
| Expiry date | Jan 27, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A conveyor arm apparatus unloads one by one a plurality of wafers which are stored in a holding chamber such that a surface of one wafer faces a back surface of another wafer at a predetermined distance. Two beams parallel to a semiconductor wafer mounting surface of a conveyor arm are projected into the holding chamber and the two beams passing through a gap between adjacent wafers are detected. Thus, the relative position of the conveyor arm and the wafers in the holding chamber can be confirmed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.