Micro-displacement measuring apparatus using a semiconductor laser
US4806778A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1986 |
| Grant date | Feb 21, 1989 |
| Priority date | — |
| Expiry date | Feb 26, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-displacement measuring apparatus using a semiconductor laser, comprises a compound resonator system containing the semiconductor laser, and a light detector receiving a light from said semiconductor laser. The compound resonator system is constructed such that a light from the semiconductor laser irradiates an object to be measured and the reflected light therefrom returns to the semiconductor laser, wherein the relationship between the reflectivity R.sub.f at the front facet of the semiconductor laser from which a laser light irradiates the object, and the reflectivity Rr at the rear facet of the semiconductor laser which is opposite the front facet is as follows: 0.1<R.sub.f Rr<1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.