Direct imaging monochromatic electron microscope
US4810880A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 5, 1987 |
| Grant date | Mar 7, 1989 |
| Priority date | — |
| Expiry date | Jun 5, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, a first transfer lens for collimating the electrons into beams, an energy filter receptive of the beams to transit monochromatic beams, and a second transfer lens receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.