Particle shielded R. F. connector for a plasma enhanced chemical vapor processor boat
US4820370A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 12, 1986 |
| Grant date | Apr 11, 1989 |
| Priority date | — |
| Expiry date | Dec 12, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32577
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The wafer processing boat of a plasma enhanced chemical vapor processor includes an R.F. connector at the inner end of its interleaved electrodes. The R.F. electrical connector includes slidably mated male and female portions for making R.F. electrical connection to the boat through the end wall of the evacuable furnace tube. A particle shield surrounds the mated male and female R.F. connector portions for confinement of particulates released during the mating of the connector. The shield includes an open end which faces downstream of the flow of processing gases to reduce backstreaming of particulates onto the wafers. The electrical male conductors of the connector are covered by a quartz sheath.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.