Method for cleanup processing chamber and vacuum process module
US4820377A · kind A · utility
297Cited by
24References
52Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1987 |
| Grant date | Apr 11, 1989 |
| Priority date | — |
| Expiry date | Jul 16, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/905
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process module having remote plasma and in situ plasma generators, and a radiant heater, which represent three separate energy sources. The three sources can be used singly or in any combination and can be separately controllable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.