Light absorbing coating
US4822718A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 1986 |
| Grant date | Apr 18, 1989 |
| Priority date | — |
| Expiry date | Feb 4, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0276
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A broad spectrum light absorbing medium to be coated over photosensitive layers, such as a photoresist for integrated circuit "chips" to act as a true surface for autofocus of the camera used to expose the photoresist. The product may also be used where a light impermeable, high contrast or black coating is needed, such as, in liquid crystal displays and light emitting diodes, photodiodes, solid state lasers, or patterning apertures on light-wave modulators. The coating absorbs light from 200 to 1000 nanometers. The coating has a polymer vehicle which can form a tightly adhering, thin, smooth and uniform coating. The coating includes a light absorbing dye. This light absorbing layer may be imageable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.