Monitor for particles of various materials
US4827143A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 1987 |
| Grant date | May 2, 1989 |
| Priority date | — |
| Expiry date | Mar 26, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monitor for particles of various materials which counts the number of the particles on real-time and in situ basis. The monitor comprises a unit for illuminating an object to be inspected with an illumination light beam of a predetermined cross-sectional area, a unit for detecting a change in optical mode of the illumination light beam caused by the particles being contained in the inspected object and illuminated with the illumination light beam, the illuminating and detecting units being of a unitary structure, and a unit for counting an amount of the particles contained in the inspected object by using a change in intensity of an optically mode changed light beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.