Process for vacuum chemical epitaxy
US4829021A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1987 |
| Grant date | May 9, 1989 |
| Priority date | — |
| Expiry date | Dec 9, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/169
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An injection block having a plurality of geometrically arranged injection sources for gaseous Group III metal organic compounds is oriented substantially perpendicular to the placement of at least one semiconductor wafer substrate within a vacuum reaction chamber. The injector sources are sized to provide disbursing flow of the compounds capable of depositing a layer of about 5% uniform thickness or less over substantially the entire semiconductor wafer. An injection source of Group V compounds is located centrally within the geometrically arranged injection sources for the Group III compounds. The Group V injection source is sized to supply an excess of the Group V compounds required to react with the Group III compounds in order to form Group III-V semiconductor layers on the substrate and partition the Group III sources into groups having substantially equal numbers of injection sources. An excess of Group V comounds is injected. The vacuum within the reaction chamber is adjusted at predetermined flow rates of the Group III compounds such that a mean-free path of the Group III compounds is greater than the distance from the injection source of the Group III compounds to the subs…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.