Inventor · Berkeley, CA, US

Paul Stephen McLeod

40Patents
11h-index
28Co-inventors
75Inventor score

Filing activity: Dec 16, 1974 → Jan 28, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US3956093A Planar magnetron sputtering method and apparatus Electricity 71 Expired
US6290821A Sputter deposition utilizing pulsed cathode and substrate bias power Chemistry; Metallurgy 66 Expired
US6582572B2 Target fabrication method for cylindrical cathodes Emerging Cross-Sectional Technologies 30 Expired
US4125446A Controlled reflectance of sputtered aluminum layers Emerging Cross-Sectional Technologies 30 Expired
US4658086A Photovoltaic cell package assembly for mechanically stacked photovoltaic cells Emerging Cross-Sectional Technologies 25 Expired
US6497799B1 Method and apparatus for sputter deposition of multilayer films Chemistry; Metallurgy 24 Expired
US4776893A GaAs on GaSb mechanically stacked photovoltaic cells, package assembly, and modules Emerging Cross-Sectional Technologies 21 Expired
US6444100B1 Hollow cathode sputter source Electricity 20 Expired
US4838201A Apparatus and process for vacuum chemical epitaxy Electricity 18 Expired
US6843892B1 Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet Chemistry; Metallurgy 15 Expired
US6156154A Apparatus for etching discs and pallets prior to sputter deposition Electricity 12 Expired
US6808741B1 In-line, pass-by method for vapor lubrication Chemistry; Metallurgy 11 Expired
US6309516A Method and apparatus for metal allot sputtering Electricity 11 Expired
US4746371A Mechanically stacked photovoltaic cells, package assembly, and modules Emerging Cross-Sectional Technologies 10 Expired
US6468405B1 Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone Emerging Cross-Sectional Technologies 10 Expired
US4829021A Process for vacuum chemical epitaxy Emerging Cross-Sectional Technologies 9 Expired
US6482301B1 Target shields for improved magnetic properties of a recording medium Electricity 8 Expired
US6613151B1 Single disc vapor lubrication Performing Operations; Transporting 8 Expired
US4131753A Multiple electron-beam vapor source assembly Electricity 7 Expired
US7041202B2 Timing apparatus and method to selectively bias during sputtering Electricity 6 Expired
US6886244B1 Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same Emerging Cross-Sectional Technologies 5 Expired
US6733590B1 Method and apparatus for multilayer deposition utilizing a common beam source Chemistry; Metallurgy 5 Expired
US8652310B2 Trim magnets to adjust erosion rate of cylindrical sputter targets Electricity 4 Active
US6511702B1 Apparatus and method to control the molecular weight distribution of a vapor Performing Operations; Transporting 4 Expired
US6569294B1 Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.