Paul Stephen McLeod
40Patents
11h-index
28Co-inventors
75Inventor score
Filing activity: Dec 16, 1974 → Jan 28, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US3956093A | Planar magnetron sputtering method and apparatus | Electricity | 71 | Expired |
| US6290821A | Sputter deposition utilizing pulsed cathode and substrate bias power | Chemistry; Metallurgy | 66 | Expired |
| US6582572B2 | Target fabrication method for cylindrical cathodes | Emerging Cross-Sectional Technologies | 30 | Expired |
| US4125446A | Controlled reflectance of sputtered aluminum layers | Emerging Cross-Sectional Technologies | 30 | Expired |
| US4658086A | Photovoltaic cell package assembly for mechanically stacked photovoltaic cells | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6497799B1 | Method and apparatus for sputter deposition of multilayer films | Chemistry; Metallurgy | 24 | Expired |
| US4776893A | GaAs on GaSb mechanically stacked photovoltaic cells, package assembly, and modules | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6444100B1 | Hollow cathode sputter source | Electricity | 20 | Expired |
| US4838201A | Apparatus and process for vacuum chemical epitaxy | Electricity | 18 | Expired |
| US6843892B1 | Apparatus and method for selectively and controllably electrically biasing a plurality of substrates on a pallet | Chemistry; Metallurgy | 15 | Expired |
| US6156154A | Apparatus for etching discs and pallets prior to sputter deposition | Electricity | 12 | Expired |
| US6808741B1 | In-line, pass-by method for vapor lubrication | Chemistry; Metallurgy | 11 | Expired |
| US6309516A | Method and apparatus for metal allot sputtering | Electricity | 11 | Expired |
| US4746371A | Mechanically stacked photovoltaic cells, package assembly, and modules | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6468405B1 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Emerging Cross-Sectional Technologies | 10 | Expired |
| US4829021A | Process for vacuum chemical epitaxy | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6482301B1 | Target shields for improved magnetic properties of a recording medium | Electricity | 8 | Expired |
| US6613151B1 | Single disc vapor lubrication | Performing Operations; Transporting | 8 | Expired |
| US4131753A | Multiple electron-beam vapor source assembly | Electricity | 7 | Expired |
| US7041202B2 | Timing apparatus and method to selectively bias during sputtering | Electricity | 6 | Expired |
| US6886244B1 | Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6733590B1 | Method and apparatus for multilayer deposition utilizing a common beam source | Chemistry; Metallurgy | 5 | Expired |
| US8652310B2 | Trim magnets to adjust erosion rate of cylindrical sputter targets | Electricity | 4 | Active |
| US6511702B1 | Apparatus and method to control the molecular weight distribution of a vapor | Performing Operations; Transporting | 4 | Expired |
| US6569294B1 | Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone | Emerging Cross-Sectional Technologies | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.