Electron beam testing of electronic components
US4829243A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1988 |
| Grant date | May 9, 1989 |
| Priority date | — |
| Expiry date | Feb 19, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24507
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam testing apparatus for applying an electron beam to parts of an electronic component and measuring the secondary electrons released from the part including a secondary electron collector having a plurality of vertically extending screens with a detector positioned adjacent one of the screens. A different voltage is applied to each of the screens of the collector for collecting the secondary electrons over a large area. The apparatus may include a combination blanking and Faraday cup for metering the electron beam current when it is blanked. The apparatus may also be used to measure net work capacitance by measuring the time required to charge a network to a predetermined voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.