Detector for charged particles
US4831267A · kind A · utility
12Cited by
1References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 22, 1988 |
| Grant date | May 16, 1989 |
| Priority date | — |
| Expiry date | Jan 22, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24578
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.