Advanced vacuum processor
US4842680A · kind A · utility
15Cited by
3References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 2, 1988 |
| Grant date | Jun 27, 1989 |
| Priority date | — |
| Expiry date | May 2, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A complete integrated circuit processing module, wherein multiple processing stations, each with its own vacuum isolation, are located inside a single module which is held at hard vacuum. A wafer transport arm mechanism permits interchange of wafers among the processing stations and a load lock. The load lock is equipped to remove and replace wafers from a vacuum-sealed wafer carrier. The wafers remain face-down and under hard vacuum during all the wafer handling steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.